ME 337 - Micro-Electro-Mechanical Systems

Credits: 3

This course explores the principles of MEMS by understanding materials properties, micro-machining, sensor and actuator principles. The student will learn that MEMS are integrated micro-devices combining mechanical and electrical systems, which convert physical properties to electrical signals and, consequently, detection. This course provides the theoretical and exercises the hands-on experience by fabricating a micro-pressure sensor.

Repeatable: May not be repeated for credit
Requirements: Permission of instructor.
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