EE 381 - Microfabrication Lab

Credits: 3

The theoretical and practical aspects of techniques utilized in the fabrication of bipolar junction transistors (BJTs). Includes crystal characteristics, wafer cleaning, oxidation, lithography, etching, deposition, diffusion, metallization, process metrics, and device characterization.

Pre-Requisites: EE 271, EE 251 or can be concurrent.
Repeatable: May not be repeated for credit
Lecture: 1.5 hours per week
Lab: 3 hours per week
Click here for course fee.