ME 447 - Thin Film Manufacturing

Credits: 3

This course explores the principles of micro-devices manufacturing by thin film deposition processing methods. Vacuum deposition technologies such as physical vapor deposition and the electron beam evaporation process will be covered for conductors, resistors, and dielectric thin film depositions. Sol-Gel chemical thin film processing of oxides and piezoelectric materials along with direct circuit manufacturing by photo seeding and electro-less copper deposition will be covered.

Requirements: Permission of instructor.
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